Virtual Project on the History of ALD (VPHA)
VPHA is an open collaborative effort, whose goal is to clarify open questions related to the early history of the Atomic Layer Deposition (ALD) thin film deposition technique. VPHA was launched in July 2013. VPHA is based on voluntary efforts, and anyone interested in the history of ALD is welcome to join. All VPHA activities are made in an atmosphere of openness, respect and trust.
Key VPHA links:
Scientific journal articles from VPHA:
Baldengineering blog posts on ALD history