ALD history publications

Virtual Project on the History of ALD

VPHA, vph-ald.com: Worldwide collaborative effort, in an atmosphere of openness, respect and trust

Newest publications first


  1. Oral presentation (to-be): "Virtual Project on the History of ALD in perspective: past, present, and final steps", R.L. Puurunen, Yu. Koshtyal, J.R. van Ommen, O. Yurkevich,

    ALD Russia 2021 http://technolog.edu.ru/aldrussia/, Saint Petersburg, Russia, 27–30 September 2021, with online participation. Submitted abstract. Slides. Live record uploaded in Youtube.

  2. Poster presentation: "Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD", (long list of authors), 19th International Conference on Atomic Layer Deposition (ALD 2019), July 21-24, 2019, Bellevue, Washington, http://ald2019.avs.org. Submitted abstract and supplementary information. Poster.
  3. Poster presentation: "Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD", (long list of authors), 

    EuroCVD 22 - Baltic ALD 16, in Luxembourg, June 24-28, 2019. Submitted abstract. Poster. 

  4. Proceedings article: R. L. Puurunen, "Learnings from an Open Science Effort: Virtual Project on the History of ALD", ECS Transactions 86(6) (2018) 3-17; doi:10.1149/08606.0003ecst. Open access preprint, DOI: 10.1149/osf.io/exyv3.
  5. Progress in device from Molecular Layering to atomic layer deposition worldwide technology, Victor Drozd, Proceedings of the International Baltic Conference on Atomic Layer Deposition, 2-4 Oct 2016, St. Petersburg, Russia. Electronically published in IEEE Xplore, http://ieeexplore.ieee.org/document/7886521/.
  6. Review article: “Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD””, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich, Journal of Vacuum Science and Technology A 35 (2017) 010801 (13 pages). http://dx.doi.org/10.1116/1.4971389. Open access.
  7. Invited talk: "On the history of ALD and the VPHA project", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, O. Yurkevich, J. Sundqvist, 14th International Conference on Atomic Layer Deposition, October 2-4, 2016, St. Petersburg, Russia. Abstract. Slides. Travel report. Live record of the presentation uploaded in the VPHA website and Youtube. Recorded slides (Oct 5).
  8. Invited plenary talk "Structural-size effects in the products obtained by the molecular layering method and their application", by Anatolii Malygin at 16th International Conference on Atomic Layer Deposition (ALD 2016), July 24-27, 2016, Dublin, Ireland. Abstract. Slides. Travel report.
  9. Poster presentation: "On the early history of atomic layer deposition: most significant works and applications", Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Simon Elliott, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis Hausmann, Cheol Seong Hwang, Marcel Junige, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, Outi Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam Lapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Luis Fabián Peña, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki Perros, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich, 16th International Conference on Atomic Layer Deposition (ALD 2016), July 24-27, 2016, Dublin, Ireland. View submitted abstract in the ALD History Blog, flash presentation slides, final abstract, poster. Travel report.
  10. Poster presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, O. Yurkevich, J. Sundqvist, combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes", May 23-24, 2016, Helsinki, Finland. Abstract, poster, one-slider. Travel notes.
  11. Essay by A. A. Malygin, V. E. Drozd, A. A. Malkov, V. M. Smirnov, "From V. B. Aleskovskii’s "Framework" Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition", Chemical Vapor Deposition 21 (2015) 216-240. DOI: 10.1002/cvde.201502013
  12. Poster presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, 13th International Baltic Conference on Atomic Layer Deposition, September 28-29, 2015, Tartu, Estonia. Abstract. Poster. Travel report.
  13. Oral presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. Abstract. Slides. Travel report.
  14. Invited talk by A. A. Malygin, "The origins of ML-ALD in the USSR-Russia: from V. B. Aleskovskiiיs “framework hypothesis” on the path to precise synthesis of solids" International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. Slides.
  15. Exhibition by the Finnish Centre of Excellence on Atomic Layer Deposition: "40 Years of ALD in Finland - Photos, Stories". Exhibition material released to internet 29.11.2014: VPHA website and at ALDCoE website.
  16. Essay by R. L. Puurunen, "A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy", Chemical Vapor Deposition 20 (2014) 332-344, DOI: 10.1002/cvde.201402012. Open Access. Full essay.
  17. Invited tutorial by R. L. Puurunen, "History of Atomic Layer Deposition", at the International AVS Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan
  18. Poster presentation "On the Early History of ALD: Molecular Layering," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, M. Junige, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, J. Molarius, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, ALD 2014 (14th International Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan. Abstract.
  19. Poster presentation "Overview of early publications on Atomic Layer Deposition," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, M. Junige, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, J. Molarius, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, ALD 2014 (14th International Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan. Abstract.
  20. Poster presentation "Overview of early publications on Atomic Layer Deposition," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, Baltic ALD 2014 (12th International Baltic Conference on Atomic Layer Deposition), May 12-13, Helsinki, Finland. Abstract.
  21. Invited conference talk by V. E. Drozd at Baltic ALD, May 12-13, 2014, University of Helsinki, Finland: "ML-ALD seeks its niche in education, science and application".
  22. Invited conference talk by T. Suntola at Baltic ALD, May 12-13, 2014, Helsinki, Finland: "40 Years of ALD in Finland - from ideas to global industry"
  23. Invited seminar talk by R. L. Puurunen, November 15, 2013, Beneq and ETU (LETI) joint ALD laboratory opening seminar, St. Petersburg, Russia "History of ALD: from lab research to industrial applications".   
  24. Review article by G. N. Parsons, J. W. Elam, S. M. George, S. Haukka, H. Jeon, W. M. M. Kessels, M. Leskelä, P. Poodt, M. Ritala, S. M. Rossnagel  "History of atomic layer deposition and its relationship with the American Vacuum Society", J. Vac. Sci. Technol. A 31, 050818 (2013); http://doi.org/10.1116/1.4816548.

    Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]",

    J. Vac. Sci. Technol. A 38, 037001 (2020); https://doi.org/10.1116/6.0000143. 

  25. Plenary  conference talk by S. M. George at International AVS Conference on Atomic Layer Deposition, "Atomic Layer Deposition from Development to Commercialization", July 28-31, 2013, San Diego, California.
  26. Book chapter by E.-L. Lakomaa, M. Lindblad, A. Kytökivi, H. Siro-Minkkinen and S. Haukka, "Catalyst processing development by Atomic Layer Epitaxy"; pp. 93-103, in book: Catalysis in Finland: an exciting pathway, Eds. K. Arve, H. Harju, A. Heponiemi, J. Linnekoski, P. Mäki-Arvela, S. Ojala, T. Salmi, S. Sundblom, A. Suopanki, S. Wallenius,  © Suomen katalyysiseura, ISBN 978-952-93-3085-0 (nid.), ISBN 978-952-93-3086-7 (PDF), Otavan Kirjapaino Oy, Keuruu 2013, pp. 1-428.
  27. Conference presentation by A. A. Malygin at the Hilovo conference, 2012, entitled (in Russian, title translated) "Contribution of V. B. Aleskovskii and his scientific school in the development of Solid State Chemistry and Nanotechnology", the Fifth All-Russian Conference (with international participation) on the Surface Chemistry and Nanotechnology, Saint Petersburg - Hilovo, Russia, September 24-30, 2012. The presentation celebrated 100 years from Prof. Aleskovskii's birth.
  28. Book chapter by J. Niinistö and L. Niinistö, "Introduction: basic features and historical development of atomic layer deposition" Atomic Layer Deposition of Nanostructured Materials. Pinna, N. & Knez, M. (eds.). 1st ed. Weinheim: Wiley-VCH 2012, 11 p.
  29. Review article by R. L. Puurunen, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process", J. Appl. Phys., 97, 121301 (2005); http://dx.doi.org/10.1063/1.1940727
  30. Invited conference talk by T. Suntola at AVS-ALD conference, 2004, August 16-18, 2004, University of Helsinki, Finland: "30 Years of ALD"
  31. Letter to the editor by A. A. Malygin and V. M. Smirnov, "Early work on atomic layer deposition cited", Solid State Technology, 2002, March, p. 14.
  32. Review article by T. Suntola, "Atomic layer epitaxy," Material Science Reports, 1989, 4, 261-312, http://dx.doi.org/10.1016/S0920-2307(89)80006-4.


contact: ALD History group in LinkedIn, https://www.linkedin.com/groups/ALD-History-5072051/about